Brooks SLA 5851S1PAB1C2A1
The Brooks Instrument SLA5851S is a high-performance, elastomer-sealed thermal mass flow controller (MFC) designed for precise gas flow measurement and control in applications like biopharmaceuticals, semiconductor manufacturing, and chemical research. It offers high accuracy (up to \(\pm0.6\%\) of setpoint), fast response times (<1 second), and a wide range of flow rates up to 2500 slpm, with robust, corrosion-resistant construction.
Key Features and Specifications:
- Accuracy: +-m0.6% of rate (20-100% Full Scale) or +-0.12% of Full Scale (<20% FS).
- Flow Range: Typically handles up to 150-2500 slpm depending on configuration.
- Operating Pressure: Up to 1500 psi (103 bar).
- Operating Temperature: -14{C}\) to 65C.
- Connectivity: Supports analog (0-5V, 4-20mA) and digital networks (RS485, DeviceNet, EtherCAT, Profibus, EtherNet/IP, PROFINET).